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接触式三坐标测量自由曲面轮廓的数据处理模型

Mathematical model of contacting freeform surface contour measurement

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【作者】 仇谷烽余景池黄启泰倪颖王毅

【Author】 QIU Gu-feng;YU Jing-chi;HUANG Qi-tai;NI Ying;WANG Yi;Institute of Modern Optics,SooChow University;

【机构】 苏州大学现代光学研究所

【摘要】 为了能够在接触式自由曲面轮廓测量过程中放宽对工件位置调整的要求并提供高精度的测量结果,本文运用最小二乘法的基本原理,提出了一个可通过测量数据拟合出一个最佳位置放置参数的数学模型。该模型能同时校正自由曲面放置时存在的绕X、Y、Z轴的微小旋转量及沿X、Y、Z方向上的微小偏离量所造成的测量误差。大量数学模拟结果表明,该模型在恢复上述误差源上具有很高的精度,可精确地恢复1cm以下的偏心和0.1°以下的旋转量。对一实际自由曲面的测量结果表明,该模型可靠有效,为接触式三坐标测量自由曲面轮廓提供了宽松的镜子放置条件,同时提供了可靠的测量结果。其分析数据的基本原理对其它非接触式的自由曲面的轮廓测量同样具有较高的参考价值。

【Abstract】 To unwind the requirement of a freeform surface for the position adjustment and to provide high precision measurement results in a high precision contacting freeform surface contour measurement,this paper proposes a mathematical model based on the least square method.The model can fit the measured dada to obtain optimized position parameters.After analysis of possible causes for the measurement error of Coordinate Measuring Machine(CMM),the model can be used to correct the errors caused by the rotation in the X,Y,Zaxes and the eccentricity in the X,Y,Zdirection that exist in the positioning of freeform surface.By mathematical simulations,it is proved that this model achieves high precision in correction of the errors for eccentricity less than 1cm and inclination less than 0.1°and shows a very reliable and effective result.It provides loose workpiece positioning conditions,high precision and reliable measurement results.The analysis principles proposed also offer a reference for other contacting freeform surface contour measurement methods.

【基金】 国家自然科学基金资助项目(No.61108042,No.61008034)
  • 【文献出处】 光学精密工程 ,Optics and Precision Engineering , 编辑部邮箱 ,2013年11期
  • 【分类号】TH721
  • 【被引频次】55
  • 【下载频次】826
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