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衬底温度对ZnMgO薄膜结构和光致发光性能的影响

Effect of Substrate Temperature on Structure and Photoluminescence of ZnMgO Films

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【作者】 董李娜王玉新孙景昌郑亚茹张焕梁鸣林茂魁崔硕

【Author】 DONG Li-na,WANG Yu-xin,SUN Jing-chang,ZHENG Ya-ru,ZHANG Huan,LIANG Ming,LIN Mao-kui,CUI Shuo School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China

【机构】 辽宁师范大学物理与电子技术学院

【摘要】 利用超声喷雾热解方法以不同的沉积温度(450~550℃)在石英衬底上制备出一系列ZnMgO薄膜。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和光致发光谱(PL)表征了样品的晶体结构、表面形貌和光学性能。结果表明衬底温度对薄膜结构性能和光学特性影响显著。所有薄膜都呈六角纤锌矿多晶结构,其中在530℃条件下制备的样品C轴择优最明显,晶粒尺寸均匀,表面形貌平整,结晶质量最好。薄膜的光致发光谱显示随着温度的升高深能级跃迁范围逐渐减小,近紫外带边发光峰逐步出现。衬底温度为530℃时在374.5nm处出现了明显的近紫外发光峰,且几乎没有明显的深能级跃迁出现。

【Abstract】 ZnMgO films were deposited on quartz glass substrates by the ultrasonic spray pyrolysis at different substrate temperatures(450~550℃).The structural,surface morphological and optical properties of the samples were investigated by X-ray diffraction(XRD),scanning electron microscope(SEM)and photoluminescence(PL)spectroscopy.The results demonstrate that the substrate temperature has important effect on structural and optical characteristics.All the films have hexagonal wurtzite polycrystalline structures and the c-axis preferential orientation has an optimum temperature of 530℃.The sample prepared at this temperature owns uniform grain size,smooth surface morphology and better crystalline quality.The width of deep-level emission decreases and the near band edge(NBE)ultraviolet emission peak appears with the increase in temperature by the PL spectrum.When the temperature arrives to 530℃,a distinct NBE emission peak can be observed at 374.5nm,while the deeplevel emission is almost undetectable.

【基金】 国家自然科学基金项目(11004092);大连市科学技术基金项目(2011J21DW013)资助
  • 【文献出处】 光谱学与光谱分析 ,Spectroscopy and Spectral Analysis , 编辑部邮箱 ,2013年08期
  • 【分类号】O484.1
  • 【被引频次】2
  • 【下载频次】95
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