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DFB激光器阵列与MMI耦合器、SOA的单片集成

DFB laser array monolithically integrated with MMI combiner and SOA

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【作者】 马丽朱洪亮梁松王宝军张灿赵玲娟边静陈明华

【Author】 MA Li1,2,ZHU Hong-liang1*,LIANG Song1,WANG Bao-jun1,ZHANG Can1, ZHAO Ling-juan1,BIAN Jing1,CHEN Ming-hua2(1.Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;2.Department of Electronic Engineering,Tsinghua University,Beijing 100084,China)

【机构】 中国科学院半导体研究所半导体材料科学重点实验室清华大学电子工程系

【摘要】 采用变脊宽原理和对接生长技术,设计并制作了4通道分布反馈(DFB)激光器阵列与多模干涉(MMI)耦合器、半导体光放大器(SOA)的单片集成器件。在25℃的测试温度下,激光器的阈值电流约55~60mA;当激光器注入150mA、SOA注入50mA电流时,各通道的出光功率保持在2mW以上,出射波长处于1 550nm波段,边模抑制比(SMSR)大于33dB,4通道可实现单独或同时工作。

【Abstract】 The monolithic photonic integrated circuit(PIC) is the core component in the future high-capacity,low-power consumption optical network systems.As a typical photonics integrated device,monolithically integrated multi-wavelength distributed feedback(DFB) laser array plays an important role in dense wavelength division multiplexing(DWDM) optical transmission systems.The monolithic integration of four distributed feedback lasers with a 4×1 multimode-interference(MMI) optical combiner and semiconductor optical amplifier(SOA) using varing width ridge method and butt-joint technology is proposed and demonstrated in this paper.The monolithically integrated chip is 2 500 μm long and 400 μm wide.The active and passive materials are integrated by the butt-joint technique,and the varing ridge width is used to adjust the effective index of the laser material,so that multi-wavelength emission can be achieved by normal holographic exposure.This method is simple and practical.The integrated device is tested at 25° for characterization.The average output power of 2 mW is achieved when the current of LD and semiconductor optical amplifier(SOA) is 150 mA and 50 mA,respectively.The threshold current of the device is 55-60 mA at 25 ℃.The lasing wavelength is around 1 550 nm and more than 33 dB sidemode suppression ratio(SMSR) is obtained.The four channels can operate separately or simultaneously.

【基金】 国家“863”计划(2011AA010303,2012AA012203);国家“973”计划(2011CB301702);国家自然科学基金(61021003,61090392)资助项目
  • 【文献出处】 光电子.激光 ,Journal of Optoelectronics.Laser , 编辑部邮箱 ,2013年03期
  • 【分类号】TN248
  • 【被引频次】8
  • 【下载频次】380
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