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等离子喷涂制备Al2O3块体材料的介电性能
Research on dielectric properties of Al2O3 bulks manufactured by plasma spray
【摘要】 将两种纯度较高的Al2O3粉末采用等离子喷涂工艺制备成块体,其孔隙率分别达到11.2%和11.6%。用等离子喷涂工艺制备的Al2O3块体在7 GHz~18 GHz下的介电常数εr分别是7.2和7.1,介电损耗tanδ分别是3.5×10-3和1.0×10-3。用这种工艺制备的Al2O3块体的介电常数比常规压制烧结工艺制备的低,但是介电损耗大,这主要与等离子喷涂工艺所制备样品的孔隙率和微结构等有关。
【Abstract】 Two kinds of alumina bulks were manufactured by plasma spray with high purity alumina powders.Porosity rates are up to 11.2% and 11.6%.Dielectric constants are 7.2 and 7.1,and dielectric loss are 3.5×10-3and1.0×10-3respectively at 7 GHz ~18 GHz.The dielectric constant of plasma sprayed Al2O3 sample is lower than that of Al2O3 ceramics shaped by pressing and sintering.whereas the dielectric loss is much more.These results are related to porosity rate,microstructure of samples manufactured by plasma spraying.
【关键词】 等离子喷涂；
孔隙率；
介电常数；
介电损耗；
【Key words】 Plasma spray； Porosity rate； Dielectric constant； Dielectric loss；
【Key words】 Plasma spray； Porosity rate； Dielectric constant； Dielectric loss；
【基金】 军工配套项目
- 【文献出处】 电子工艺技术 ,Electronics Process Technology , 编辑部邮箱 ,2013年02期
- 【分类号】TN04
- 【被引频次】2
- 【下载频次】72