【摘要】 随着电子产品集成度越来越高,器件对静电也越来越敏感,容易受静电放电导致损伤或损坏。文章介绍了静电的产生机理,阐述在生产制造过程中静电产生的来源以及危害。介绍了净化间内部抑制静电产生的三大措施:防止静电荷积聚,建立安全的静电泄放通路,以及采取静电监控设备进行静电监控。提出采用镀锡铜排环绕厂房内部的形式来消除静电防护死角,并重点描述了防静电门禁系统和静电在线监控系统的工作原理及功能实现,结合电子封装厂房结构特点,首次提出防静电门禁系统与风淋门联动控制,有效控制封装厂房的静电来源。更多还原

【Abstract】 With the development of electronic products increasing integration,device is more and more sensitive to static electricity,and is susceptible to electrostatic discharge damage.This paper describes the mechanism of static electricity,expatiates the origin and the harm of static electricity.Introduces several measure to control static electricity in clean plant: preventing the accumulation of electrostatic charge,building safe electrostatic discharge path,and using electrostatic monitor equipment to monitoring the static electricity.Put forward to fix copper basketwork plated with tin along the wall to avoid ESD protection dead area.Introduces work principle and the function of electrostatic monitor system.Combined with the plant structure specialty,put forward the linkage control of antistatic access control system and air shower door for the first time,to control the electrostatic source effectively.更多还原