【摘要】 在超精密加工中,需要亚微米乃至纳米级的定位,而常规的伺服电机驱动、精密滚珠丝杠传动方案的定位精度一般只能达到微米级.为提高数控进给装置的定位精度,在原有伺服进给定位装置的基础上,总结现有微定位补偿机构设计的不足,提出新的闭环伺服精密微位移补偿控制方案,以显著减小数控伺服进给装置的定位误差.设计的压电驱动微定位工作台具有纳米级位移分辨率和定位精度,静、动刚度好.试验表明,本系统设计的10μm行程微定位平台能很好地补偿数控滚珠丝杠副定位偏差,实现超精密加工的超精密进给要求.更多还原

【Abstract】 Submicron or even nanoscale positioning accuracy is generally required during ultra-precision machining.The positioning accuracy of conventional servo motor and precision ball screw driver can only reach micron level.To improve the positioning accuracy of CNC feed device,this paper proposes a new closed-loop displacement compensation control program based on the original positioning device.Displacement resolution and positioning accuracy of the piezoelectric drive micro-positioning work platform can reach nanoscale level.Good performances both in static and dynamic stiffness are obtained.The tests show that 10 μm stroke ultra-precision micro-positioning platform can perfectly compensate the deviation of CNC ball screw positioning and achieve the requirements of ultra-precision machining feed.更多还原