【摘要】 微靶是惯性约束聚变研究中的一个关键器件,针对该器件研制了一种半自动微装配系统,该系统可以对由两半腔(直径约800～1000μm,长1 mm左右)和微球(直径200～500μm)组成的微器件进行半自动装配。详细介绍了该系统的结构与组成及其所采用的关键技术与解决方案,分析了装配过程显微在线检测系统误差影响因素,并建立了测量误差数学模型。装配实验表明:该系统的装配精度≤10μm。更多还原

【Abstract】 Micro-target is an important device for inertial confinement fusion(ICF)research.A semi-automatic micro-assembly system is developed,which can be used to assemble micro inertial confinement fusion(ICF)target which is made up of two half-hohlraum(diameter range 800 -1 000 μm,length is about 1 mm)and a capsule(diameter range 200 -500 μm).Structure and compostion of the system is described,and the key technology and solution is introduced.The effect factors and mathematic model of online measuring system error for assembling process is analyzed.The results of target assembly experiments show that the precision of this system is not more than 10 μm.更多还原