【摘要】 利用超声—重力耦合场分离原理,设计并制造了一种分离微纳米颗粒的场流分离设备。通过对分离腔中流体层的声场和颗粒受力特性进行研究,确定分离设备的制作工艺,对基片的雕刻过程和键合过程的加工参数进行了优化,并对超声分离微纳米颗粒的发展方向进行了展望。更多还原

【Abstract】 By use of ultrasound-gravity coupled field separation principle,the authors design and manufacture a separate field of micro and nano particles flow separation equipment.Through the study to the sound field and force characteristics in separation chamber,the production process of separating apparatus has been identified,and the processing parameters to the substrate engraving process and bonding process are optimized.Finally,the development directions of ultrasound separation micro and nano particles have been forecasted.更多还原