【摘要】 提出了一种叉指式微机电系统(MEMS)可变电容设计方案,并从结构、电学特性、工艺三方面进行了仿真设计。由仿真结果可知:驱动电压为67 V时,该设计理论电容可调率3.45,电容调节范围88.16~392.19 fF,谐振频率36 GHz,Q值223(1 GHz),反射衰减0.002 25 dB,插入损耗42.75 dB.与其他形式可变电容相比,该设计理论电容具有高Q值、高电容可调率和工艺简单的技术优势。更多还原

【Abstract】 A design scheme of micro-electro-mechanical system(MEMS) tunable capacitor with comb structure is proposed.Simulation design was implemented in terms of structure,electrical properties and process.FEM simulation indicates that,for the tunable capacitor,the capacitance tuning ratio is 3.45∶1,the tuning range is 88.16~392.19 fF at 67 V drive voltage,the resonant frequency is 36 GHz,Q factor is 223(1 GHz),and the reflection attenuation is 0.002 25 dB,insertion loss is 42.75 dB,respectively.Compared with other tunable capacitors,the design has high Q,high adjustable capacitance rate and simple process.更多还原