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A low-noise high-linearity interface ASIC for MEMS gyroscopes

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【作者】 方然鲁文高王冠男陶婷婷张雅聪陈中建于敦山

【Author】 Fang Ran;Lu Wengao;Wang Guannan;Tao Tingting;Zhang Yacong;Chen Zhongjian;Yu Dunshan;National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Peking University;

【机构】 National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Peking University

【摘要】 This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes.A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise.In order to cancel the effect caused by the gyroscope capacitive mismatch,a mismatch auto-compensation circuit is implemented.The gain and phase shift of the drive closed loop is controlled separately by an auto gain controller and an adjustable phase shifter.The chip is fabricated in a 0.35 m CMOS process.The test of the chip is performed with a vibratory gyroscope,and the measurement shows that the noise floor is 0.003/s/pHz,and the measured drift stability is 43/h.Within –300 to 300/s of rotation rate input range,the non-linearity is less than 0.1%.

【Abstract】 This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes.A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise.In order to cancel the effect caused by the gyroscope capacitive mismatch,a mismatch auto-compensation circuit is implemented.The gain and phase shift of the drive closed loop is controlled separately by an auto gain controller and an adjustable phase shifter.The chip is fabricated in a 0.35 m CMOS process.The test of the chip is performed with a vibratory gyroscope,and the measurement shows that the noise floor is 0.003/s/pHz,and the measured drift stability is 43/h.Within –300 to 300/s of rotation rate input range,the non-linearity is less than 0.1%.

【基金】 Project supported by the Special Fund for Agro-Scientific Research in the Public Interest(No.200903021)
  • 【文献出处】 Journal of Semiconductors ,半导体学报(英文版) , 编辑部邮箱 ,2013年12期
  • 【分类号】TN47
  • 【被引频次】5
  • 【下载频次】60
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