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A substrate-free optical readout focal plane array with a heat sink structure

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【作者】 刘瑞文孔延梅焦斌斌李志刚尚海平卢狄克高超群陈大鹏张青川

【Author】 Liu Ruiwen~2,Kong Yanmei,Jiao Binbin Li Zhigang Shang Haiping,Lu Dike Gao Chaoqun~2,Chen Dapeng,and Zhang Qingchuan 1 Integrated Circuit Advanced Process Center,Key Laboratory of Microelectronics Device and Integration Technology, Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China 2 Kunshan MicroOptica Electronic Co.Ltd,Kunshan 215300,China 3 University of Science and Technology of China,Hefei 230027,China

【机构】 Integrated Circuit Advanced Process Center,Key Laboratory of Microelectronics Device and Integration Technology,Institute of Microelectronics,Chinese Academy of SciencesKunshan MicroOptica Electronic Co.LtdUniversity of Science and Technology of China

【摘要】 <正>A substrate-free optical readout focal plane array(FPA) operating in 8-12μm with a heat sink structure (HSS) was fabricated and its performance was tested.The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity.The thermal cross-talk effect existing in traditional substrate-free FPAs was eliminated effectively.The heat sink is fabricated successfully by electroplating copper,which provides high thermal capacity and high thermal conductivity,on the frame of substrate-free FPA. The FPA was tested in the optical-readout system,the results show that the response and NETD are 13.6 grey/K(F / # = 0.8) and 588 mK,respectively.

【Abstract】 A substrate-free optical readout focal plane array(FPA) operating in 8-12μm with a heat sink structure (HSS) was fabricated and its performance was tested.The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity.The thermal cross-talk effect existing in traditional substrate-free FPAs was eliminated effectively.The heat sink is fabricated successfully by electroplating copper,which provides high thermal capacity and high thermal conductivity,on the frame of substrate-free FPA. The FPA was tested in the optical-readout system,the results show that the response and NETD are 13.6 grey/K(F / # = 0.8) and 588 mK,respectively.

【基金】 Project supported by the Chinese Academy of Sciences Knowledge Innovation Project(No.07YF031001);the Natural Science Foundation of Jiangsu Province,China(No.BK2012219),the Key Lab of Microelectronics Device and Integration Technology,China
  • 【文献出处】 Journal of Semiconductors ,半导体学报 , 编辑部邮箱 ,2013年02期
  • 【分类号】TN219
  • 【被引频次】4
  • 【下载频次】61
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