【摘要】 针对一种喇曼型声表面波声光器件的设计需求,设计制作出一种能够满足喇曼-奈斯衍射要求的、低损耗、高Q值声表面波谐振器。利用耦合模(COM)理论仿真谐振器的性能,建立谐振器的COM模型,求解COM方程,提取出COM参数。利用COM软件仿真设计谐振器的结构参数,设计的谐振器中心频率为78.028MHz,Q值为10 428,插入损耗为-6.153dB。利用微加工技术加工制作出声表面波谐振器,用矢量网络分析仪对其性能进行测试,得到谐振器实际中心频率为78.34MHz,插入损耗为-11.273dB,Q值为6 465.7,该谐振器能够满足喇曼型声表面波声光器件的应用需求。更多还原

【Abstract】 According to requirements of a Raman-type acousto-optic device driven by surface acoustic wave(SAW),a SAW resonator with low loss and large Q value was designed and fabricated,which can meet the requirement of Raman-Nath diffraction.The performance of the resonator was simulated by establishing COM(coupling-of-model)model,solving COM equation and extracting COM parameters.The design parameters of the resonator were simulated by COM software,and it is show that the theoretical center frequency,Qvalue and insertion loss of the designed resonator are 78.028MHz,10428and-6.153dB,respectively.Then the resonator was fabricated with micromachining technology and its performance was tested with vector network analyzer.Such results are obtained as:the actual center frequency of 78.34 MHz,insertion loss of-11.273dB,Qvalue of 6 465.7.更多还原