【摘要】 采用RF-PECVD法在锗(Ge)基片上沉积类金刚石(DLC)薄膜,研究了气体流量和气压对沉积区域均匀性的影响,以及基片厚度与沉积时间的关系。用拉曼光谱(Raman)分析DLC膜的结构组成,用傅立叶红外光谱仪(IR)对DLC膜的透过率进行了测量。结果表明,在气体流量为50 sccm,气压为10 Pa,功率800 W条件下薄膜厚度均匀性可达2.1%,极值透过率达62%。更多还原

【Abstract】 Diamond-like carbon(DLC) coatings were prepared on germanium(Ge) substrates using RF-PECVD method.The effects of gas flow rate and pressure on the uniformity of deposition area were studied,and the relationship between the substrate thickness and deposition time was obtained.The composition of DLC coating was analyzed by Raman spectroscopy(Raman),and the optical property was measured by Infrared Spectrum(IR).The results show that the thickness uniformity of DLC coatings can reach 2.1%,and the maximum transmittance achieves 62% with the gas flow rate of 50sccm,pressure of 10Pa and power of 800W.更多还原