【摘要】 针对直接驱动XY平台伺服系统的位置控制进行设计,考虑到系统的扰动、摩擦等因素引起的误差,采用零相位误差跟踪控制器和干扰观测器相结合的控制方法,通过零相位误差跟踪控制器来减小系统的跟踪误差,并通过干扰观测器来减小扰动对系统的影响,从而同时提高系统的跟踪性能和鲁棒性能。仿真实验结果表明,所提出的控制方案对提高伺服系统的定位精度有一定的作用。更多还原

【Abstract】 For direct drive XY table servo system,position control is designed.Considering the error which is caused by the disturbance of the system,friction factor and so on.The control method combing the zero phase error tracking controller(ZPETC) with the disturbance observer(DOB) is adopted.The system tracking error is reduced by adopting ZPETC,and through influences of disturbance to the system is diminished by the disturbance observer.Thus the tracking accuracy and robustness of the system are improved.Simulation results show that this control scheme is useful.更多还原