Influence of ignition condition on the growth of silicon thin films using plasma enhanced chemical vapour deposition

【摘要】 The influences of the plasma ignition condition in plasma enhanced chemical vapour deposition (PECVD) on the interfaces and the microstructures of hydrogenated microcrystalline Si (μc-Si:H) thin films are investigated.The plasma ignition condition is modified by varying the ratio of SiH 4 to H 2 (R H).For plasma ignited with a constant gas ratio,the time-resolved optical emission spectroscopy presents a low value of the emission intensity ratio of Hα to SiH (I Hα /I SiH) at the initial stage,which leads to a thick amorphous incubation layer.For the ignition condition with a profiling R H,the higher I Hα /I SiH values are realized.By optimizing the R H modulation,a uniform crystallinity along the growth direction and a denser μc-Si:H film can be obtained.However,an excessively high I Hα /I SiH may damage the interface properties,which is indicated by capacitance-voltage (C-V) measurements.Well controlling the ignition condition is critically important for the applications of Si thin films.更多还原

【Abstract】 The influences of the plasma ignition condition in plasma enhanced chemical vapour deposition (PECVD) on the interfaces and the microstructures of hydrogenated microcrystalline Si (μc-Si:H) thin films are investigated.The plasma ignition condition is modified by varying the ratio of SiH 4 to H 2 (R H).For plasma ignited with a constant gas ratio,the time-resolved optical emission spectroscopy presents a low value of the emission intensity ratio of Hα to SiH (I Hα /I SiH) at the initial stage,which leads to a thick amorphous incubation layer.For the ignition condition with a profiling R H,the higher I Hα /I SiH values are realized.By optimizing the R H modulation,a uniform crystallinity along the growth direction and a denser μc-Si:H film can be obtained.However,an excessively high I Hα /I SiH may damage the interface properties,which is indicated by capacitance-voltage (C-V) measurements.Well controlling the ignition condition is critically important for the applications of Si thin films.更多还原