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静电悬浮转子悬浮控制系统探析
The research of suspend controlling system of electrostatic suspended micro gyroscope
【摘要】 为了实现静电转子的稳定悬浮,建立了针对于悬浮转子的静电支承模型。在模型的建立过程中,分析了静电力作用机理,给出了静电力计算公式。接着建立了以DSP TMS320F28335开发板为核心的悬浮控制辅助系统。设计了基于AD7656的16A/D转换电路和基于时间管理模块的DSP脉宽调制信号发生器。
【Abstract】 First of all,analysis of the change of gyro’s motion state under antihunt effect.the discussion of the application of digital signal processing technology for the purpose of testing and controlling micro levitated rotor gyroscope.Second,the signal testing method is introduced,includingIV conventioon,pre-amplification,filtering circuit,A/D converting circuit and the gyro signal testing system with the use of digital signal processor or NI virtual intrument.
【关键词】 MEMS;
微陀螺;
静电悬浮;
电容检测;
TMS320F28335;
虚拟仪器;
【Key words】 MEMS; Micro Gyroscope; Electrostatic Suspension; Capacitance Detection; TMSS20F2SSS5; Virtual instrument;
【Key words】 MEMS; Micro Gyroscope; Electrostatic Suspension; Capacitance Detection; TMSS20F2SSS5; Virtual instrument;
- 【文献出处】 自动化与仪器仪表 ,Automation & Instrumentation , 编辑部邮箱 ,2012年02期
- 【分类号】TP273
- 【被引频次】2
- 【下载频次】70