【摘要】 对电子辅助热丝化学气相沉积(Electron-assisted Chemical Vapor Deposition,EACVD)系统的一体化技术进行了研究,介绍了EACVD一体化系统的原理和设计,系统包括机械系统和控制系统。金刚石的沉积实验表明,该系统可以提供高质量金刚石生长所需的均匀温度场,而且结构简单、制造成本低。该系统可用于光学涂层以及金刚石微器件的制备研究。更多还原

【Abstract】 The integration technology for the EACVD system is studied,and the theory and design of EACVD integration system was introduced in detail.The set composed of a mechanical system and control system.Diamond deposition experiments show that,the system can provide the uniform substrate temperature field for high quality diamond growth,and with simple structure,low manufacture cost.The system can be used in optical coating and preparation of diamond micro device.更多还原