【摘要】 本文我们通过电化学腐蚀方法实验制备出一种多孔硅微腔结构,采用热氧化功能处理,采用APTES小分子进行了生物传感实验,实验测量了生物分子进入到一维多孔硅微腔前后的反射光谱;同时,我们采用转移矩阵理论,利用Matlab进行理论仿真小分子进入到一维多孔硅微腔前后的反射光谱.研究结果表明:一维多孔硅光子晶体微腔结构的生物传感器,具有很高的特异性和灵敏度,且有检测周期短、精度高、免标签等优点.此项研究也有助于指导设计实用化多孔硅微腔结构光子晶体生物传感器.更多还原

【Abstract】 In this paper,a kind of microcavity structure of porous silicon is prepared through the method of electrochemical etching and then it was treated by thermal oxidation;the experiment measures the reflectance spectrometry of biological molecules before and after they enter the microcavity structure of one-dimensional porous silicon;meanwhile, the calculated reflectivity spectra of the biosensor were studied contrastively before and after attachment of small molecules.The research result shows mat the porous silicon microcavity biosensor has the characteristics of high sensitivity and specificity,short monitoring period,high accuracy and label-free.The results of this study will help guide practical design of silicon-based photonic microcavity biosensor.更多还原