【摘要】 纳米薄膜材料是一种新型材料,由于其特殊的结构特点,使其作为功能材料和结构材料都具有良好的发展前景。本文综述当前纳米薄膜的制备技术,并针对这些成膜工艺,概括表征纳米薄膜厚度的常用方法。更多还原

【Abstract】 Nano-scale thin film is a new type of material,and it has a wide range of potential applications both as functional materials and as structural materials in the future.The preparation techniques and the thickness measurements of nano-scale thin films are reviewed.更多还原