【摘要】 用纳米氮化钽粉末烧结制备了氮化钽烧结体,分析了烧结体的物相结构,研究了形成液种类、形成液浓度、温度、电流密度以及赋能电压等条件对氮化钽阳极氧化膜电性能的影响。结果表明,该烧结体是由纯氮化钽组成的,氮化钽阳极块体阳极氧化过程的最佳赋能工艺:磷酸溶液浓度0.01%,形成液温度55℃,电流密度40mA/g,形成电压小于16V。更多还原

【Abstract】 Sintered tantalum nitride anodes were prepared with tantalum nitride nanopowders.The sintered anode slugs were examined by XRD.The effects of formation solution in terms of its variety,concentration and temperature,current density and formation voltage on electrical characteristics were studied.The results show that the anode slugs are made of pure tantalum nitride phase,and the optimum anodizing process conditions including H3PO4 concentration of 0.01%,temperature of formation solutions of 55 ℃,current density of 40 mA/g and the formation voltage of less than 16 V.更多还原