【摘要】 设计了一种大面积无缝无特征显微图像拼接测量系统,该系统基于光学显微系统和大行程纳米级计量型三维精密位移工作台,建立了以测量系统自身的计量系统来标定CCD摄像机和计算CCD与水平工作台夹角的数学模型,解决了一般图像测量系统需借助外部设备进行标定和夹角测量的问题。构建了非正交水平工作台移动策略,用于光学显微图像大面积无缝无特征拼接,减小了拼接量,扩大了横向测量范围,解决了测量视场与横向测量分辨率受限于物镜数值孔径的问题。更多还原

【Abstract】 A type of large area,seamless and featureless microscopy image stitching measurement system has been designed.Based on the optical microscopy system and 3D precision displacement system with large travel,nanometer level and measurement,a mathematic model for calibrating CCD cameras with its own measuring system and calculating the angles between CCD and level worktables is established to solve the problem that the CCD calibration and angle measurement of general measurement system depend on external equipments.Meanwhile a non-orthogonal worktable moving strategy is set up for the seamless stitching measurement of optical microscopy image measurement,which reduces the cost of stitching and enlarges the scope of cross measurement.Therefore the problem of lateral resolution and the measurement filed being restricted to the numerical aperture of objective is solved.更多还原