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电化学腐蚀法制备微圆柱电极数值模拟
Numerical Simulation of Fabricating Microelectrodes Based on Electrochemical Etching
【摘要】 基于电化学腐蚀原理,利用COMSOL Multiphysics有限元分析软件进行微圆柱电极电解加工数值模拟研究:采用传导介质DC模式和瞬态移动网格ALE模式联合建模,并将试验参数(如电压、电极丝浸入溶液深度、溶液浓度等)对试验结果的影响进行了分析。研究表明,该方法切实可行,能够减少工艺试验次数,缩短加工周期。
【Abstract】 Based on the principle of electrochemical corrosion,COMSOL Multiphysics is used to simulate the fabrication of microelectrodes.This model uses the conductive media DC and transient moving mesh(ALE) application modes.Effects of the applied voltage,immersed depth and electrolyte concentration are discussed.Studies have shown that the method is feasible.The number of experiment is reduced greatly and the fabrication period is shortened.
【关键词】 电化学腐蚀;
微电极;
COMSOL Multiphysics;
【Key words】 electrochemical etching; microelectrodes; COMSOL Multiphysics;
【Key words】 electrochemical etching; microelectrodes; COMSOL Multiphysics;
【基金】 浙江省科技厅科研计划资助项目(2008C31029);宁波城市职业技术学院校内重点资助科研项目(ZWX10082)
- 【文献出处】 机械设计与研究 ,Machine Design & Research , 编辑部邮箱 ,2012年06期
- 【分类号】TG661
- 【被引频次】2
- 【下载频次】233