【摘要】 探讨了掺钨类金刚石(W-DLC)膜沉积及离子渗硫两步合成DLC和WS2复合固体润滑膜的新方法。利用低温离子渗硫技术对4种钨含量的W-DLC膜进行离子渗硫处理,采用扫描电子显微镜(SEM)、俄歇扫描探针(SAM)、X射线光电子能谱(XPS)、拉曼光谱仪(Raman),纳米硬度计(Nano-indenter)和摩擦磨损试验机考察了渗硫处理后W-DLC膜的微观结构与摩擦学性能。结果表明:渗硫处理使W-DLC膜中生成了WS2,促进了DLC膜的石墨化,并降低了其纳米硬度;随钨含量增加,渗硫处理的W-DLC膜纳米硬度逐渐升高,摩擦系数和磨损率逐渐减小,渗硫后的27.7%W-DLC膜表现出最优异的摩擦学性能。更多还原

【Abstract】 A new method for synthesizing W-doped diamond-like carbon(W-DLC) with WS2 composite solid lubrication film by deposition and low temperature ion sulfuration technology was studied.W-DLC films with different W contents were prepared.Microstructure,nanohardness and tribological behavior of the sulfurized W-DLC film were investigated by means of scanning electron microscopy(SEM),scanning Auger microscopy(SAM),X-ray photoelectron spectroscopy(XPS),Raman spectroscopy(Raman),Nano-indentation,friction and wear tester.The results show that WS2 is formed and the content of sp2-C increases on the surface of W-DLC film after ion sulfuration,which makes the hardness of W-DLC film decrease.The nanohardness of the sulfurized W-DLC film rises with the increase of W content in the film while the friction coefficient and the wear rate decreases with the rise of W content in the film.The sulfurized W-DLC film with the W content of 27.7% exhibits the lowest friction coefficient and wear rate.更多还原