【摘要】 为了研究SiC晶体光学方面的应用,利用飞秒激光冷加工的特点,对SiC晶体进行精微加工,研究了激光脉冲功率和扫描速率对光栅单元的影响,选取适合SiC晶体飞秒加工的工作条件,分别在晶体表面与内部加工出高质量的光栅。对加工好的光栅进行衍射通光实验,计算其各级衍射角,从而验证加工好的光栅周期;并在1300℃高温下进行退火实验,退火前后,光栅参量无明显变化。结果表明,该光栅适合在高温环境下使用。更多还原

【Abstract】 In order to study SiC crystal application in optics,the grating structures on the surface and inside of SiC crystals were fabricated using femtosecond laser cold processing method,respectively.The effect of femtosecond laser power density and scanning speeds was studied in detail.Finally,the gratings were fabricated under appropriate processing conditions.After that the gratings period was verified in the diffraction experiments and the diffraction angles at different orders were calculated,the gratings were annealed at 1300℃,the grating parameters had no obvious change after annealing.It indicates that the fabricated gratings in SiC can be applied in high temperature environment.更多还原