【摘要】 利用吉布斯自由能理论对西门子体系进行了热力学分析,梳理了体系中可能发生的系列化学反应。结果表明,多晶硅生产主反应为裂解反应而非还原,SiHCl3裂解生成SiCl2(g)和HCl(g),进而生成Si和SiCl4(g)。这不仅合理地解释了实际生产中副产大量四氯化硅等问题,而且为优化还原工艺提供了有价值的科学依据。更多还原

【Abstract】 The thermodynamic analysis of Siemens system are carried out in detail with the method of Gibbs Free Energy theory,and a series of chemical reactions may occur in the system are hackled.The result shows that the main reactions of polysilicon production is decomposition reaction instead of reduction,SiHCl3 splitting generation SiCl2(g)+HCl(g),and then generate Si and SiCl4(g).This not only reasonably used to explain amount of silicon tetrachloride by-product in actual production but also provide scientific evidence for optimizing the reduction technology.更多还原