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水热法制备Si基片状ZnO微晶薄膜
Hydrothermal synthesis of plate-like ZnO micro-crystal films on silicon substrates
【摘要】 采用真空蒸镀法在Si(100)基底上制备了六角片状Zn微晶薄膜,并由N2H4·H2O-水热体系制备了Si基片状ZnO微晶薄膜。XRD、SEM及EDS测试与分析结果表明,纤锌矿结构片状ZnO微晶长度约1μm、厚度约100nm,几乎垂直于Si基面,且在基面上随机组合成连续薄膜。联系室温Si基Zn微晶薄膜氧化物形貌,以"氢氧化锌脱水"反应解释了Si基片状ZnO微晶薄膜的生长机制。光致发光谱测试分析表明,ZnO微晶薄膜有强的近带边紫外光发射和弱的缺陷发射。
【Abstract】 The hexangular plate-like zinc micro-crystal films were deposited on silicon(100) substrates through the vacuum evaporation method and the plate-like ZnO micro-crystal films were prepared on silicon substrates by hydrothermal process with N2H4·H2O solution.The results of XRD,SEM and EDS analyses indicate that the plate-like ZnO micro-crystals with zincblende structure have a length of about 1μm and a thickness of about 100nm,which grow almost vertically to the surface of silicon substrate and randomly assemble to form a continuous film.Taking account of the morphologies of oxidation product of zinc micro-crystal films on silicon substrates at ambient,the mechanism of zinc hydroxide dehydration is suggested to explain the formation process of the plate-like ZnO micro-crystal films on silicon substrates.The photoluminescence spectrum shows that the ZnO micro-crystal film is with a strong emission at near edge band-gap and weak emissions related to defects.
- 【文献出处】 功能材料 ,Journal of Functional Materials , 编辑部邮箱 ,2012年21期
- 【分类号】TB43
- 【下载频次】122