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PIN边缘不规则形态的高精度快速视觉检测方法研究
High-precision and fast visual inspection method on irregular edge for PIN
【摘要】 基于远心视觉光学成像方法,构建了对存在厚度且边缘不规则工件的高精度快速检测量系统。基本原理是,经过远心镜头的主光线均平行于光轴,且唯有与光轴平行或接近平行的光线能够到达CCD接收面。实验及理论分析表明,扁型、方型和圆柱型3种PIN检测经过远心视觉系统成像后的边缘锐利度分别提高了2.8、10.4和21.4%,从而提高了PIN边缘检测的精确度,并表明远心视觉系统对有一定厚度且边缘平滑的工件检测更有优势。本文提出的采用LEESOS的TLW130D-0.165×构成的远心光学系统较好地控制了PIN检测系统的测量误差,是一套适合PIN边缘检测的测量系统。
【Abstract】 A new method for optical imaging based on the principle of telecentric vision is proposed.The problem of high precision and fast measurement of the irregular edges with a certain thickness is solved.The basic principle is that all primary rays passing through the telecentric lens are parallel to optical axis.And only the rays parallel or nearly parallel to optical axis can be received by CCD surface.The experiment application and theoretical analysis show that the edge sharpnesses of the flat PIN,the quadrilateral PIN and the cylindrical PIN are respectively increased by 2.8%,10.4% and 21.4%,after imaged by telecentric vision system.It is clear that the telecentric vision system is more beneficial to inspect the workpiece with thickness and smooth transition edge.This paper proposes a telecentric optical system which uses LEESOS′ TLW130D-0.165× telecentric lens,better controlling measurement error of PIN inspection system.
【Key words】 optical imaging; telecentric optics; edge irregularity; accuracy; gray value curve;
- 【文献出处】 光电子.激光 ,Journal of Optoelectronics.Laser , 编辑部邮箱 ,2012年12期
- 【分类号】TP274;TP391.41
- 【被引频次】7
- 【下载频次】104