【摘要】 设计并制作了一种基于微光机电系统(MEMS)微镜的可调光衰减器(VOA)。其中微镜的谐振频率为11.26kHz,采用垂直梳齿驱动器驱动。微镜采用体硅微加工工艺在绝缘体上硅(SOI)片上制作。采用制作的微镜和双光纤准直器装配成VOA,衰减器在扭转角度为0.3°时驱动电压只有4.4V,开启和关断时的响应时间分别为1.67ms和2.74ms,插入损耗为0.6dB,最大衰减值为40dB。更多还原

【Abstract】 This paper presents the design,simulation,fabrication and successful demonstration of a variable optical attenuator(VOA) based on micromachined micromirror.The micromirror has a rotational resonance of 11.26 kHz,and is actuated by vertical comb driver which is fabricated by bulk micromaching process on a silicon on insulator(SOI) wafer.The VOA is composed of the micromirror and double fiber collimators.The VOA operates at a low driving voltage of 4.4 V corresponding to the rotation angle of 0.3°.The turn-on and turn-off response time of the VOA is 1.6 ms and 2.74 ms,respectively.The insertion loss is 0.6 dB.The optical attenuation is measured and an optical attenuation as large as 40 dB is obtained.更多还原