【摘要】 通过采用底部绝缘结构的GaAs外延结构技术,并采用化学腐蚀和绝缘胶相结合的隔离技术,制作出了在激光器(波长790～850 nm)照射条件下具有高转换效率的激光供能微型(2.1 mm×2.1 mm)GaAs电池。实验结果显示该电池的开路电压达到6 V以上,具有良好隔离特性,但是由于边缘漏电影响填充因子,最终的转换效率为33.7%。在电极结构设计和互联处理工艺上的改进有助于提高电池的效率。更多还原

【Abstract】 A interlinked micro GaAs optical power receiver(2.1 mm×2.1 mm) with the technology of GaAs epitaxial was developed,combined with the relative etching and protect technology.The open circuit voltage of the receiver can exceed 6 V under the laser irradiation with the wavelength of 790-850 nm,which indicates that the receiver has an excellent isolation characteristic.But the conversion efficiency of the receiver can only reach 33.7% because of the leakage current.However,the conversion efficiency of the receiver can be improved by the optimizing of the electrode structure and process technology.更多还原