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用双光束干涉制作二维光子晶体
Fabrication of two-dimensional photonic crystal by double-beam interference
【摘要】 利用双光束干涉,在光敏材料上制作光子晶体结构.通过改变两束光之间的夹角可以改变制备样品的周期.改变曝光次数以及两次曝光时干涉条纹的夹角可以分别得到一维、二维正方晶格以及二维三角晶格结构的光子晶体.
【Abstract】 The fabricate photonic crystal on photosensitive material is proposed by double-beam interference.The period of the structure can be controlled by changing the angle between two beams.The one-dimensional grating structure and two-dimensional photonic crystals with square lattice and triangular lattice should be obtained by changing the time of exposure and the angle between the interference fringe of two exposures.
【关键词】 双光束干涉;
干涉光刻;
光子晶体制作;
【Key words】 double-beam interference; interference lithography; fabrication of photonic crystal;
【Key words】 double-beam interference; interference lithography; fabrication of photonic crystal;
- 【文献出处】 大学物理 ,College Physics , 编辑部邮箱 ,2012年05期
- 【分类号】O436.1
- 【被引频次】2
- 【下载频次】229