【摘要】 在采用扩散连接的方法制备具有微型流道结构的化学机械系统时,流道部分因焊接压力无法直接传递,往往形成未焊合造成泄漏。采用一个简单的线性弹性模型对不同宽度和厚度的流道处的接触压力进行了有限元模拟,并结合流道处的金相照片对其连接状态进行分析。结果表明:要实现层板间的有效连接,层板间各处的接触压力应不小于1 MPa;流道所允许的宽度是有限的,并且随着流道厚度的增加而增加。更多还原

【Abstract】 Diffusion bonding is used for micro-chemo-mechanical system with microchannel,the regions of microchannel do not directly transmit pressure,and result in leakage.A simple linear elastic model is used to calculate the stress between the lamina which has different span and thickness,and analyse combined appearance of microstructure.The results show when the lamina is bonded together,the stress should be more than 1MPa.The width of microchannel is limited,and which increased,when the thickness increased.更多还原