Hydrophobic Ti_xO_y-C_mH_n Nanoparticle Film Prepared by Plasma Enhanced Chemical Vapor Deposition

【摘要】 The hydrophobic films of TixOy-CmHn deposited from mixture gases of titanium isopropoxide (TTIP) and oxygen by plasma enhanced chemical vapor deposition (PECVD) were investigated. The films were investigated by scanning electron microscope (SEM), transmission electron microscope (TEM), Fourier transform infrared spectrometer (FTIR), X-Ray diffraction (XRD), element analysis (EA), ultraviolet visible spectrometer (UV-Vis), and water contact angle (WCA). The results reveal that the surface of the films is formed by microsized papillaes aggregated by inorganic and organic phases of complex nanoparticles with size from 50 nm to 200 nm when the discharge power is increased from 40 W to 150 W. All films demonstrate the strong broad of Ti-O-Ti stretching vibration at 400-800 cm-1, -CH bending vibration at 1388 cm-1, and broadening -OH stretching vibration at 3000-3500 cm-1. With the increase of the discharge power, the as-deposited film changes from amorphous to crystallization. The WCA of the film can be as high as 160°, indicating the hydrophobicity. The films show a similar ultraviolet absorption property as the bulk TiO2 film. The composition of the composition of film deposited at 150 W can be formulated as Ti0.3O2-C1.5H3. Therefore, the composition formula of this hydrophobic film could be expressed as TiO2-C5H10O4.7. It is believed that the complex micro/nano structures of TiO2 and C5H10O4.7 residues are responsible for the observed hydrophobicity and the ultraviolet absorption property of the film.更多还原

【Abstract】 The hydrophobic films of TixOy-CmHn deposited from mixture gases of titanium isopropoxide (TTIP) and oxygen by plasma enhanced chemical vapor deposition (PECVD) were investigated. The films were investigated by scanning electron microscope (SEM), transmission electron microscope (TEM), Fourier transform infrared spectrometer (FTIR), X-Ray diffraction (XRD), element analysis (EA), ultraviolet visible spectrometer (UV-Vis), and water contact angle (WCA). The results reveal that the surface of the films is formed by microsized papillaes aggregated by inorganic and organic phases of complex nanoparticles with size from 50 nm to 200 nm when the discharge power is increased from 40 W to 150 W. All films demonstrate the strong broad of Ti—O—Ti stretching vibration at 400-800 cm-1, —CH bending vibration at 1388 cm-1, and broadening —OH stretching vibration at 3000-3500 cm-1. With the increase of the discharge power, the as-deposited film changes from amorphous to crystallization. The WCA of the film can be as high as 160°, indicating the hydrophobicity. The films show a similar ultraviolet absorption property as the bulk TiO2 film. The composition of the composition of film deposited at 150 W can be formulated as Ti0.3O2-C1.5H3. Therefore, the composition formula of this hydrophobic film could be expressed as TiO2-C5H10O4.7. It is believed that the complex micro/nano structures of TiO2 and C5H10O4.7 residues are responsible for the observed hydrophobicity and the ultraviolet absorption property of the film.更多还原