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Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction

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【Author】 Zhang Zuwei~(1,2,3,+),Wen Zhiyu~(1,2,3),HuJing~(1,2,3) 1 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology,Chongqing University, Chongqing 400030,China 2 National Center for International Research of Micro/Nano-System and New Material Technology,Chongqing University, Chongqing 400030,China 3 Microsystem Research Center of Chongqing University,Chongqing 400030,China

【机构】 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology,Chongqing University,Chongqing 400030,China； National Center for International Research of Micro/Nano-System and New Material Technology,Chongqing University,Chongqing 400030,China； Microsystem Research Center of Chongqing University,Chongqing 400030,China；

【摘要】 <正>The design and simulation of a novel microoptoelectromechanical system(MOEMS) accelerometer based on Raman-Nath diffraction are presented.The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers.The fundamental theories and principles of the device are discussed in detail,a 3D finite element simulation of the flexural plate wave delay line oscillator is provided,and the operation frequency around 40 MHz is calculated.Finally,a lecture experiment is performed to demonstrate the feasibility of the device.This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation,and has great potential for various applications.更多还原

【Abstract】 The design and simulation of a novel microoptoelectromechanical system(MOEMS) accelerometer based on Raman-Nath diffraction are presented.The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers.The fundamental theories and principles of the device are discussed in detail,a 3D finite element simulation of the flexural plate wave delay line oscillator is provided,and the operation frequency around 40 MHz is calculated.Finally,a lecture experiment is performed to demonstrate the feasibility of the device.This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation,and has great potential for various applications.更多还原

【关键词】 accelerometer； MOEMS； Raman-Nath diffraction； FPW delay line oscillator；
【Key words】 accelerometer； MOEMS； Raman-Nath diffraction； FPW delay line oscillator；

【文献出处】半导体学报 ,Journal of Semiconductors , 编辑部邮箱 ,2012年04期

【分类号】TP211.4
【被引频次】1
【下载频次】35

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