【摘要】 利用多物理场有限元软件COMSOL Multiphysics3.5(a)对多晶硅定向凝固过程进行数值模拟,获得了定向凝固过程中加热熔化和结晶过程的温度场分布。通过对模拟结果的分析,得到了多晶硅熔化过程温度分布和结晶时固液界面形状,为后续生产实践中工艺方案的优化及缺陷分析等提供重要的理论依据。更多还原

【Abstract】 In this paper,based on the finite element COMSOL Multiphysics3.5(a) software,numerical simulation of directional solidification process for the polycrystalline silicon was conducted.The distributions of the temperature field for the melting and crystallization process of polycrystalline silicon were obtained.By analyzing this simulated results the process of polycrystalline silicon melting and the shape of solid-liquid interface were obtained.It will provide an important theoretical basis for optimizing technological program and defects analyzing in the follow-up productive practice.更多还原