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高纯、细晶Al2O3陶瓷的Mo-Mn金属化机理研究

Investigation in Metallizing Mechanism of High Pure and Fine Grained Al2O3 Ceramic by Molybdenum-Manganese Process

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【作者】 张巨先石明尚阿曼

【Author】 ZHANG Ju-xian1,2,SHI Ming1,SHANG A-man1 (1.Beijing Vacuum Electronics Research Institute,Beijing 100015,China; 2.Vacuum Electronics National Laboratory,Beijing 100015,China)

【机构】 北京真空电子技术研究所大功率微波电真空器件技术国防科技重点实验室

【摘要】 通过对高纯、细晶Al2O3陶瓷金属化层、金属化层被酸腐蚀后的陶瓷表面显微结构及金属化层中元素在金属化层与陶瓷中的分布情况分析,探讨了高纯、细晶Al2O3陶瓷的Mo-Mn金属化机理。研究发现高纯、细晶Al2O3陶瓷的金属化机理与95%Al2O3陶瓷存在很大不同,高纯、细晶Al2O3陶瓷金属化时,Al2O3相通过溶解-沉淀传质过程,细小颗粒和固体颗粒表面凸起部分溶解,并在金属化层中的较大Al2O3颗粒表面析出。在Al2O3颗粒生长和形状改变的同时,金属化层形成致密结构,完成了烧结,实现了金属化层与高纯、细晶Al2O3陶瓷的紧密结合。

【Abstract】 The metallizing mechanism of high pure and fine grained Al2O3 ceramic by molybdenum-manganese process was discussed by observing the microstructure of metallized layer and the surface of Al2O3 ceramic which was eroded by HNO3 acid,and also by analyzing the element distribution in the metallized layer and Al2O3 ceramic.It was found that the metallizing mechanism of high pure and fine grained Al2O3 ceramic by molybdenum-manganese process was quite different from that of 95% Al2O3 ceramic.During the metallization process of high pure and fine grained Al2O3 ceramic,the fine Al2O3 grains and the bulge of Al2O3 grains on the surfaces of the ceramics were dissolved into the glass phase and subsequently deposited on the surface of large Al2O3 particles in the metallized layers.So the Al2O3 grains grew up and its shape changed.At the same time,the metallized layers became dense and the sintering process of metallized layers was finished.The strong bonding of metallized layer and high pure and fine grained Al2O3 ceramic was achieved.

  • 【文献出处】 真空电子技术 ,Vacuum Electronics , 编辑部邮箱 ,2011年04期
  • 【分类号】TQ174.1
  • 【被引频次】19
  • 【下载频次】259
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