【摘要】 介绍了一种基于多目标遗传算法的硅微机械电容式麦克风优化设计方法。以复合敏感膜参数、底板参数以及敏感膜与底板间距为设计变量,麦克风灵敏度、最大工作电压、工作频率带宽为优化设计目标,采用多目标遗传算法求出Pareto最优解集。在所求出的Pareto最优解集中选择一组最符合设计要求的解作为麦克风的设计参数。更多还原

【Abstract】 A new approach to design micromachined condenser microphone based on multi-objective genetic algorithm was proposed.The parameters of the sandwich diaphragm and the backplate as well as the space among them as the design variables,and the sensitivity and the pull-in voltage and the frequency bandwidth were optimized.A Pareto-optimal set was obtained by multi-objective genetic algorithms.The set,in accordance with demands of design mostly was chosen as the parameters of microphone from the Pareto-optimal set.更多还原