【摘要】 ZrC涂层是高温气冷堆包覆燃料颗粒最具潜力的一种阻挡层材料。本文利用热力学软件HSC-Chemistry 5.0对化学气相沉积ZrC涂层进行模拟计算。结果表明,化学气相沉积ZrC涂层较佳工艺参数范围如下:原料气体中C/Zr比为0.5～1.5,H2/Ar比为0.5～1.5,沉积温度为1 450～1 650℃。更多还原

【Abstract】 ZrC coating is the most potential retardant layer of high-temperature gas-cooled reactor(HTGR) coated fuel particles.Simulative calculation of chemical vapor depositing(CVD) ZrC coating was studied with HSC-Chemistry 5.0 code.It is found that the proper technological parameter range of ZrC coating is the C/Zr ratio of raw gas 0.5-1.5,the H2/Ar ratio of raw gas 0.5-1.5,and the temperature 1 450-1 650 ℃.更多还原