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椭偏法测定TiO₂薄膜的光学常数

Ellipsometry Measurement of Tio₂ Film’s Optical Constants

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【Author】 YANG Xiu-wen,WANG Ming-qiu,WANG Jin-wei(Department of Physics and Electronic Engineering,Yunyang Teachers’ College,Danjiangkou 442700,China)

【机构】郧阳师范高等专科学校物理与电子工程系；

【摘要】详细介绍了使用椭偏仪测定薄膜的光学常数的原理,采用溶胶-凝胶法在普通载玻片上制备了均匀透明的TiO2薄膜,借助椭偏仪测量了薄膜的光学特性.更多还原

【Abstract】 This paper has discussed the rule of ellipsometry measurement of Tio2 film’s optical constants in details.Homogeneous and transparent thin Tio2 films have been prepared on glass substrates by sol gel processing,and the optical constants measured by use of ellipsometry.更多还原