【摘要】 为了进一步扩大原子力显微镜(AFM)的应用范围,研制出一套大范围高速AFM系统。该系统采用上、下两个扫描器,上扫描器负责Z方向闭环控制的动态响应,下扫描器负责X、Y方向平面扫描及Z方向补偿控制。针对样品放置倾斜对大范围扫描成像的影响,提出基于多线扫描的样品自动调平控制技术。首先通过多线扫描确定样品倾斜位置,然后将所有扫描点的倾斜位移差用函数式表达,最后将位移差换算为控制电压作为扫描器Z向的前馈控制输入。实验结果表明,能消除样品倾斜对AFM大范围扫描的影响。更多还原

【Abstract】 In order to expand the application range of AFM,a large-range and high-speed atomic force microscope(AFM) system was developed.The system includes two scanners,the top one is used for dynamic response of closed-loop control in Z direction,the bottom one is used for XY scan and Z compensation.To deal with the effect of uneven sample placement on large-range scan imaging,an auto leveling control technique based on multi-lines scan is presented.Firstly,the sample tilt is determined through multi-line scanning.Then,the tilt displacements of all scanning points are expressed as a functional expression.Finally,the tile displacement values are transformed into control voltage and fed into the feedforward control input in Z direction.Experiment results show that the proposed auto leveling control technique could be used to eliminate the uneven sample placement influence on AFM large-range scanning.更多还原