【摘要】 目前跨尺度纳米定位技术在纳米操作、大规模集成电路制造和生物技术等众多领域都有着广泛的应用前景。该文对目前应用较多的宏微混合式驱动、压电超声马达驱动、尺蠖式驱动和粘滑式驱动这4种跨尺度定位技术驱动原理进行了介绍,并对其分辨率、速度、推力、尺寸、驱动器数量和结构6个方面进行了比较和分析,得出粘滑驱动以其驱动范围大,分辨率高,结构简单,体积小和集成度高等突出优点,适用于微纳操作领域。对目前国内外粘滑驱动在驱动原理、关键技术和样机实验方面的研究进行了分析,总结出目前粘滑驱动研究中的研究基础和不足,并提出了有待解决的问题和关键技术。更多还原

【Abstract】 The trans-scale precision positioning technology has been already owned broad prospects in many engineering fields such as the nano-manipulation,large-scale IC fabrication and the bio-technics etc..The operating principles of 4 types of trans-scale precision positioning technologies of the macro-micro hybrid driving,piezoelectric ultrasonic motor driving,inchworm-type driving and slip-stick driving have been summarized in this paper and the resolution,speed,force,size,actuator numbers and structure of these 4 types of driving methods have also been compared and analyzed.The results showed that the slip-stick driving method had the advantages of the large scope movement,high resolution,simple structure,small size and high integration,thus was very suitable for the micro and nano-manipulation applications.The driving principle,key technology research and prototype experiment study of the stick-slip driving method at home and abroad were analyzed.The problems of the stick-slip driving existed in the current studies and the key technology to be resolved have also been proposed in this paper.更多还原