【摘要】 2011年6月5日至9日,第16届国际固态传感器、执行器与微系统会议(Transducers’11)在北京国家会议中心隆重召开。此次会议设有微纳传感器、微加工技术、生物、微能源等12个专题,共录用743篇文章,吸引了来自世界各地的1200多位专家、学者。本文将从大会特邀报告、微流体技术、圆片级加工技术、化学传感器、微能源装置等角度详细介绍此次会议的盛况,分析相关领域的研究现状及发展趋势,并对会议的影响进行总结和阐述。更多还原

【Abstract】 The 16th International Conference on Solid-State Sensors, Actuators and Micro Systems(Transducers’11) was held in Beijing, China during June 5-9,2011. Including Sensors, Actuators, Fabrication,Bio-MEMS, Power MEMS and several other subjects, 743 papers were accepted. This conference broughttogether more than 1200 leading scientists and researchers world-wide to disseminate their most recent andadvanced findings. In this review, the current research in microfluidics, wafer-level process, chemical sensorsand Power MEMS was introduced. The prospect of transducers was analyzed. The success of this conferencewould greatly promote the development of MEMS in China.更多还原