【摘要】 利用真空蒸发的方法制备ZnSe多晶薄膜,并采用双源法对薄膜进行了Dy的掺杂。用XRD、紫外可见分光光度仪对薄膜的性质进行了表征。结果表明,当Zn、Se原子配比为0.9∶1时可制备较理想的ZnSe多晶薄膜,稀土Dy掺杂并未改变样品的物相结构,但掺杂使薄膜的晶格常数及晶胞体积略有增大,还使得薄膜的晶粒尺寸及压应力变小,掺杂后薄膜的光透射性得到改善。更多还原

【Abstract】 ZnSe thin films were prepared by vacuum evaporation on glass substrate.A dysprosium doping was made in the thin films by double-source evaporation.The films were characterized with XRD and UV spectrophotometer.The result showed that the ZnSe thin films were the best when Zn∶Se=0.9∶1.Dy doping improved their optical transmission,did not change the sample’s crystal structure,enhanced their lattice constant and crystal cell volume,and minished its grain size and internal stress.更多还原