【摘要】 采用椭圆偏振光谱法,在1.50～4.50eV光谱范围内,研究了在蓝宝石衬底上使用分子束外延方法制备的纤锌矿结构ZnO薄膜的光学性质.对椭圆偏振光谱拟合结果表明,坦吉扩展(Tanguy extend)色散公式能更准确、方便地描述ZnO薄膜带边附近的折射率和消光系数的色散关系.提供了ZnO薄膜在1.50～4.50eV光谱范围内的寻常光(o光)和非常光(e光)折射率和消光系数色散关系,为定量分析ZnO薄膜带边附近各向异性的光学性质提供了依据.更多还原

【Abstract】 The optical property of wurtzite ZnO film was investigated by spectroscopic ellipsometry(SE) in the spectrum range from 1.50 eV to 4.50 eV.The ZnO film was fabricated by molecular beam epitaxy(MBE) on the sapphire.Tanguy extend dispersion formulas was used to characterize optical property of wurtzite ZnO film.According to the fitting result of SE,Tanguy extend dispersion formulas can well characterize dispersion relation of refractive and extinction index near band edge.The dispersion relation of refractive and extinction index of extraordinary(e) and ordinary(o) was offered,which is the base of quantitative analysis of anisotropic optical character of ZnO film.更多还原