【摘要】 利用辉光等离子体辅助热丝化学气相沉积法,制备硫掺杂n型金刚石薄膜,利用光学发射谱技术对其生长环境进行原位诊断,分析合成机理及生长的最佳条件。结果表明,合成金刚石薄膜的合成反应区中主要粒子为CH、CH+、活性H原子,提高工作气压和硫碳配比浓度有利于提高硫掺杂浓度,在低温条件下合成了高品质的硫掺杂n型金刚石薄膜。更多还原

【Abstract】 The sulfur doped n-type diamond films were prepared by the GPCVD(glow plasma chemical vapour deposition) technique.Diagnosis of plasma envieonment for synthesizing diamond films was conducted by optical emission spectra.The results show that the concentration of sulfur doped in diamond film was improved when the gas pressure and RS/C were improved,and the high-quality sulfur doped n-type diamond film was obtained at low deposition temperature.The experimental conditions for system of [CH4+H2] have been optimized.更多还原