【摘要】 通过对Pirani真空变送器的测量和校准,分析Pirani真空变送器输出信号和真空度之间的函数关系。由输出信号示值误差与真空度示值相对误差之间的关系,建立Pirani真空变送器的校准装置,并对某类型的Pirani真空变送器进行了测量,测量结果扩展不确定度U=0.046V(k=2),对应于真空度示值相对误差δ不大于±10%。更多还原

【Abstract】 Calibration of Pirani Vacuum Transmitter was investigated. In the article, the function relationship between the output signal of Pirani Vacuum Transmitter and the vacuum value was analyzed and the relation between the signal indication error and the relative error of the vacuum value was drawn. A calibration apparatus was built and a type of Pirani Vacuum Transmitter was tested by the apparatus. The expanded uncertainty of measurement is 0.046V(k=2) and the relative error of the vacuum value according to the expanded uncertainty is under ±10%.更多还原