【摘要】 在单晶硅太阳电池的制备中,碱性腐蚀常被用于在晶体硅上形成金字塔结构,减小光的反射,提高太阳电池的效率。获得小而分布均匀的金字塔绒面结构有利于提高太阳电池的转化效率。本文通过优化NaClO织构工艺,获得了金字塔平均尺寸为1.4μm,平均表面反射率为11.5%的织构绒面,并探索了形成小金字塔的机理。认为NaClO具有一定的氧化性是其形成小金字塔的可能原因。为了研究氧化性在织构中的作用,采用在无氧化性的NaOH溶液中分别通入了氧气和氩气。实验结果表明,在常规的NaOH织构过程中加入氧化剂有助于减小金字塔的尺寸。由于NaClO溶液自身既具有碱性,又具有氧化性,织构时不需要额外地加入氧化剂。与常规织构所用的NaOH溶液相比,NaClO溶液更易得到小而分布均匀的金字塔绒面,更适用于太阳电池的制备。更多还原

【Abstract】 During the fabrication process of single crystal silicon(c-Si) solar cell,the anisotropic etching is often used to form a pyramidal structure on the c-Si wafer.This structure could reduce the reflection of light and enhance the efficiency of solar cells.It is clear that wafers with small and uniform pyramids on their surfaces are beneficial to improve the device performance.The texturing technique of sodium hypochlorite(NaClO) was optimized and a textured surface was obtained on which the average size of pyramids is 1.4 μm and the average reflectivity is 11.5%.The mechanism of texturization by NaClO was studied.The small pyramids formed by NaClO solution may own to the oxidizing property of NaClO.In order to investigate the effect of oxidizability on the process of texturization,oxygen gas and argon gas was flowed into the non-oxidizing NaOH solution,respectively.The results showed that adding oxidant in NaOH solution is effective to reduce the size of pyramids on the textured surface.As a alkaline and oxidizing reagent,NaClO does not need to add an extra oxidant in the texturing solution.Compared with the common texturing technique in NaOH solution,texturization in NaClO solution is easier to obtain a small and uniform pyramidal structure and is more suitable for the production of solar cells.更多还原