【摘要】 采用80C51单片机系统对PH-700A型多弧离子镀膜机的起弧单元进行了改进,实现了弧靶起弧的自动控制,精确控制了不锈钢靶的起弧间隔时间和燃弧时间。利用该套设备和多弧离子镀技术以每间隔数分钟开启不锈钢靶数秒的方式制备了TiN/不锈钢多元纳米复合膜层,并对膜层的断口形貌、相组成、择优取向、硬度等进行了测试分析。结果表明,镀膜分层均匀,层与层之间有清晰的界面,晶粒尺寸普遍<15 nm,达到了纳米晶水平。更多还原

【Abstract】 The arcing unit of PH700A multi-arc ion plating machine was improved by using 80C51 monolithic processor.As a result,the automatically arcing of arc target was realized,and the arcing interval and the arc duration of stainless steel target could be accurately controlled.A nano TiN multi-element composite film was prepared with the aid of this type of multi-arc ion plating machine and the ion plating technology as well as in a manner that the stainless steel target is started for several seconds at the interval of a few minutes.The fracture pattern,phase structure,preferred orientation and hardness of TiN nano film were also tested.The results show that TiN nano multi-element composite film consists of several uniformly distributed layers with clear interfaces,and its grain size is commonly less than 15 nm,reaching the nanocrystal level. Key wodrs: 80C51monolithic processor;automatic control;multi-arc ion plating;nano composite film更多还原