【摘要】 综合考虑了几何像差、衍射效应和加工精度等因素对KBA X射线显微镜分辨力的影响,构建了分辨力模型。通过光线追迹模拟得到了不同视场位置的边缘响应函数,以20%～80%的评价标准确定了几何像差分辨力。由构建的空间分辨力模型得到理论分辨力。KBA X射线显微镜整个视场几何像差分辨力、理论分辨力和实测分辨力基本一致。用单层膜KBA显微镜获得的X射线成像结果,得出中心视场的分辨力约为4μm,±100μm视场的分辨力优于5μm。实验结果表明,几何像差对空间分辨力影响权重相对较大,是影响空间分辨力的决定性因素,其它因素的影响相对较小。更多还原

【Abstract】 The spatial resolution model of KBA X-ray microscope is built,taking into account geometrical aberration,diffraction effect,etc.Through ray-tracing,the edge response function(ERF) of different fields of view is got,and the geometrical aberration resolution based on the criterion of the ERF between 20% and 80% of its peak-valley value is determined.According to our model,the ideal resolution is obtained.In all the field of view,the geometrical aberration resolution,ideal resolution and experimental resolution are in good agreement.Using the X-ray image from the single film KBA microscope,the resolution is calculated to be about 4 μm in central field and better than 6 μm in ±100 μm range.The experiment result shows that,geometrical aberration is the key factor that determines the spatial resolution.更多还原