【摘要】 研究2A12铝合金精密件表面在低温磁控溅射沉积TiN薄膜过程中,基体表面粗糙度对成膜过程及薄膜显微硬度的影响。结果表明,低温磁控溅射沉积处理几乎不改变2A12铝合金精密件基体原始表面形貌,对其精密加工状态具有遗传性或复制性。通过显微硬度测试表明,随着2A12铝合金精密件加工精度的提高,基体表面粗糙度降低,TiN薄膜的显微硬度稳定在19 MPa以上,满足了2A12铝合金精密测试杆特殊功用的要求。更多还原

【Abstract】 The surface of 2Al2 aluminum alloy precise part has been coated by TiN using low temperature magnetic sputtering deposit.The effect of the substrate surface roughness on film forming process and micro-hardness of the film has been investigated.The results show that the morphology of the original substrate surface of 2A12 aluminum alloy precise part almost does not be changed by the low temperature magnetic sputtering,and the precision machining status of substrate surface is hereditary and reproductive.The micro-hardness experiments show that the roughness of the substrate surface decreases with the increasing of precision machining of the 2A12 aluminum alloy part,and the micro-hardness of the TiN film maintained at 19 MPa and over,which can make the 2A12 aluminum alloy precision test bar satisfy the requirement for its special usage.更多还原