【摘要】 提出了基于光热(PT)微膨胀原理的新型光热微驱动技术.设计了一种能将纵向光热膨胀转化成横向偏转的微驱动器.以AutoCAD设计图为基础,采用KrF准分子激光微加工系统,在单层高密度聚乙烯(HDPE)上加工出长1 500μm、宽250μm、厚40μm的开关式光热微驱动器.从微驱动器的扫描电子显微镜(SEM)图可以看出,微驱动器形状与AutoCAD设计值符合良好.光热微驱动实验采用脉冲频率可调的半导体激光器(4 mW,650 nm)作为驱动源.实验结果表明,在一定的脉冲频率范围(如0～17 Hz)内,光热微驱动器具有良好的静态和动态特性,其横向偏转量最大可达11μm,足以实现微开关功能.这种光热微驱动器可由激光束直接控制,具有原理新颖、结构简洁、体积小、易于加工制作等特点,在微纳米技术领域和微光机电系统(MOEMS)中具有广阔的应用前景.更多还原

【Abstract】 This paper proposed a new technique of micro-actuating based on the mechanism of micro photothermal(PT) expansion.A microactuator that can convert longitudinal PT expansion into lateral deflection was designed.On the basis of AutoCAD design and controlling,a switch-like PT microactuator with 1 500 μm-length,250 μm-width and 40 μm-thickness was manufactured by a KrF excimer laser micromachining system using single-layer high-density polyethylene(HDPE).Scanning electron microscope(SEM) image showed that the manufactured microactuator was in good agreement with the AutoCAD blueprint.Experiments were carried out on the switch-like microactuator using a semiconductor laser(4 mW,650 nm) with variable pulse frequencies as its actuating source.The results show that,within a certain pulse frequency range(e.g.,0—17 Hz),this microactuator demonstrates good static and dynamic characteristics,and its lateral deflection amplitude can reach up to 11 μm,which is sufficient for realizing micro-switching.This kind of microactuator that can be directly controlled by laser beam has a simple structure and a small volume and is easy to manufacture.The technique of PT microactuator may be quite useful for applications in the fields of micro/nano-technology and micro-opto-electromechanical systems(MOEMS).更多还原